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2004?N



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?g?s?b?N?X



	2005?N

	2004?N

	2003?N?ȑO

	?易游m6在线登录入口???͂?????


		?g?s?b?N?X 2004?N

*?g?s?b?N?X?̓??e?͔??\???̂??̂ł??B?̔??????ɏI?????Ă??鏤?i??A?g?D?̕易游m6在线登录入口???A?ŐV?̏??ƈقȂ?ꍇ??????܂??̂ł??????????????B

?ȃX?y?[?X?E???@?\?^?A?i?m???????͑??u?易游m6在线登录入口????̔??ɂ???

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2004?N3??25??

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?@??????\???U?t?H?[?h????U?????͂Ƃ́A?w???E???易游m6在线登录入口y???f?C?I???????????p???č????Ŏ????ɓ??āA???????̌??q?j?ɏՓ˂??Ă͂˕Ԃ??Ă????C?I???̃G?l???M?[?̑傫??????????\???o??ő??肷?邱?ƂŁA???茳?f?₻?̕??z?Ȃǂ𕪐͂??鑕?u?̂??Ƃł??B
?@???Ђ̐??????邱?̕??͑??u?́A2?ݸ޽?۰с易游m6在线登录入口2?j?i0.2??Ұ?فj?Ƃ??????E?I?ɂ??ō????x???̐[?????????ʐ??\?i????\?易游m6在线登录入口3?j?j???????Ă??܂??B???׉??E?W?ω??̐i?ގ?????LSI?iMOSFET?易游m6在线登录入口4?j?j?̊J???ɂƂ??Ē??j?v?f?ł???i?m???[?g?????x???̃Q?[?g?≏??(High-k)?易游m6在线登录入口5?j?̑g?????͂?A?????㔼???̃??????[?Ƃ??ėL?]??MRAM?i?G??????*6?j?̎??????w????1???q?w???x???̐??x?Ōv?????邱?Ƃ??\?ł??B

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(2)	???̓`?????o?[??Ⴍ?ݒu???A?????̑????y?ю??S?o???易游m6在线登录入口̑??삪?֎q?ɍ????đΉ??\?B
(3)	?`?????o?[???̐^???Ԃ??ێ??????܂܁A?G?l???M?[???o??̎U???p(*7)?̕易游m6在线登录入口??C?ӂ̊p?x?ɗe?Ղɐݒ?ł???p?x???ݕ易游m6在线登录入口?@?\???J???B?ɂ߂ĒZ???ԂɊp?x?易游m6在线登录入口???ł??鑀?쐫?B
(4)	?]???̉?????ɂ͍???(0.6MPa)?̐≏?K?X???[?U???Ă??܂??????A????J??????500kV?̐V?^??????ł易游m6在线登录入口?[?U?K?X????0.19MPa?ȉ??ɗ}???邱?Ƃɂ??i??2?툳?͗e??̑ΏۊO?j??舵?????e?ՁB
(5)	??????易游m6在线登录入口?t?g??Ǝ??ɊJ???B????ꂽ????f?[?^???猳?f????肵?A???̑g?????z???????I?ɒ?ʉ?????i?????t?B?b?e?B???O?j?@?\??t?????????ƂŁA??͎??Ԃ̒Z?k???ƃf?[?^?̍????x?????͂???A?]???@?ɑ????ċ@?\????????B

?@???̑??A?e??@?\?????̌??f?̒?ʕ??́A???????]???A???f???́A?i?q?̘c?ݑ???@?\???ɏ?L?e??̉??ǂ??????Ĉ?w?̊????x?????߁A???q???x???̕??́A??͂??s???c?[???Ƃ??āA?????㔼???̔????E???C?L?^?֘A???w?????̊J?????s????w?⃁?[?J?[?易游m6在线登录入口????@?֌????Ƃ??ċߔN?̃i?m?e?N?m???W?[?ɑΉ????Ă??܂??B

?@??????X?̃A?v???P?[?V?????̓K?p?易游m6在线登录入口??Ă͋????J???҂ł??鋞?s??w?H?w?????ȁE?ؑ????񋳎??̎x???A???͂𓾂Ȃ??獂????\???U?t?H?[?h????U???̍X?Ȃ?W?J??i?߂Ă??܂??B

?@???A????V????????c?^??????\???U?t?H?[?h????U?????͑??u?ɓ??ڂ??܂??????^??????易游m6在线登录入口NEDO?i?Ɨ??s???@?l?@?V?G?l???M?[?E?Y?ƋZ?p?????J???@?\?j????ϑ???????{???Ă???A??ՋZ?p???????i???Ƃ??瓾??ꂽ?J???Z?p???ꕔ?ɍ̗p???????̂ł??B

?@???Ђ͂??̐V???i?̑??ɂ??A?^???f???^?易游m6在线登录入口8?j?}?C?N??RBS?PIXE?易游m6在线登录入口9?j??W???^?}?C?N??RBS?PIXE?y?у}?C?N???r?[?????C???易游m6在线登录入口10?j?A???^HRBS?A?G???h?X?e?[?V?????A?????퓙?????C???A?b?v???A???[?U?j?[?Y?ɑΉ????Ă??܂??B?????č???Ƃ??Ƒn?I?ȐV???i?̊J???A???@?\???E???????̒?ĂȂǂ?ϋɓI?ɍs???Ă????l???ł??B

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*1	易游m6在线登录入口	?F	Rutherford?@Backscattering?@Spectroscopy(???U?t?H?[?h?̌???U???????@)?B?w???E???易游m6在线登录入口y???f?C?I?????????Ŏ????ɓ??Ă????A???????̌??q?j?ɏՓ˂??Č???֎U?????Ă????g???C?I???̃G?l???M?[?̑傫???𑪒肷?邱?Ƃɂ??A????̌??f??m?镪?͎?@?B
*2	?I???O?X?g???[??	?F	?????̒P?ʂłPx10?8?????B???f???f?P?易游m6在线登录入口???ɑ???????B
*3	????\	?F	???ꂽ?Q?_?Ԃ????易游m6在线登录入口???\?́B?{???̏ꍇ?[???????̂Q?_?Ԃ??Ӗ?????B
*4	易游m6在线登录入口?g?????W?X?^	?F	Metal Oxide Semiconductor Field-Effect Transistor?i?????_?????????̓d?E???ʌ^?g?????W?X?^?[?j?̗???易游m6在线登录入口?̊?{?g?????W?X?^?ł???B
*5	?Q?[?g?≏??	?F	?l?n?r?g?????W?X?^?易游m6在线登录入口?[?g?d?ɉ??ɂ???_?????i?r???n?Q?j?B???̖?????ă`?????l???̓d?ׂ?U?N??????B
*6	易游m6在线登录入口	?F	?L???f?q?Ɏ????̂?p???????????̈??B?]???̃??????iDRAM??t???b?V?????????j???d?q??p???ċL?^???Ă???̂ɑ΂??āAMRAM?̓n?[?h?f?B?X?N?易游m6在线登录入口Ɠ??l?Ɏ????̂?p???Ă???B
*7	?U???p	?F	?C?I???r?[???̓??ˊp?x?ɑ΂??U???C?I???????o????ׂ̃Z???T?[?̌??o?ʒu?ɂ???Č??܂?p?x?B???̊p?x??^???Ԃ??ێ??????܂ܕ易游m6在线登录入口?ł??邱?Ƃ͑??쐫???i?i?Ɍ??シ??B?@
*8	?^???f???^	?F	???C?I?????v???X?d?易游m6在线登录入口????ĉ??????A?????ŉדd?ϊ????X?ɃA?[?X?d?易游m6在线登录入口????čĉ??????????G?l???M?[?𑝑傳??????@?B
*9	易游m6在线登录入口	?F	易游m6在线登录入口rticle?@Induced?@X-ray?@Emission(???q??N?w?????o?j?C?I?????ő̒???ʉ߂??鎞???q?̓??k?O???d?q??e???o???ƁA?????? ?O?k?d?q???J?ڂ??ē????w???????o????錻?ہB
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